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DFM・Mask Verification

Super High-speed Display and Analysis Browser

 

HOTSCOPE

Opens and displays the ultra-large scale data of more than 100GB at high speed

Multitude of built-in analysis functions allow for the acceleration of thorough LSI analysis and sharing of results

Achieves high scalability through a high level, highly functional, scripting API language "AXEL"

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  • Multi format, Multi platform
  • Various advanced analysis functions
    • - Various measurement functions
    • - Image display, Image processing
    • - Image calculation function
    • - Cross section viewing, cross section analysis
    • - Enhanced equipotential line tracking capability
    • - Schematic display function
    • - CMP analysis support function
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Cross-section Shape Simulator

 

PARADISEWORLD-2

High-speed LSI cross section shape simulation based on mask layout

  • Display the cross-sectional shape between two points specified on the layout
  • Possible to simulate assuming the dust and deficiency
  • Easy registration without setting complex process conditions
  • With tuning function, possible to simulate nearly identical shapes as SEM images
  • With the 3D option, a rectangle area between two points can be displayed as 3D
  • Using the capacity option, calculates capacitance between wiring and wiring resistance
  • Applies to a broad range of fields, LSI, FPD, and the magnetic head, etc.
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