Super High-speed Display and Analysis Browser  HOTSCOPE
Open and display super large scale data that exceeds 100GB at high speed With various analytical functions, accelerates comprehensive LSI analysis and information sharing High scalability in high functional API and high-level script language “AXEL” Multi format, Multi platform Advanced various analysis functions Various measurement functions Image display, Image processing Image calculation function Cross section viewing, cross section analysis Enhanced equipotential line tracking capability Schematic display function CMP analysis support function
CMP film thickness distribution Analysis Tool  CMP-Designer
Optimization of CMP process, design rule High accuracy analysis of the film thickness distribution with CMP polishing Possible to predict accurately such as flatness prediction and resistance increase with the decrease of Cu film thickness by dishing Supports both single-layer and multi-layer model of ILD-CMP, STI-CMP, Cu-CMP Advanced Cu/Low-k support Automatic calibration capability
Cross-section Shape Simulator  PARADISEWORLD-2
High speed LSI cross section shape simulation based on mask layout Viewing the cross section between 2 points which are appointed on layout Possible to simulate assuming the dust and deficiency Requires only simple registration, without complicated setting of process condition With tuning function, possible to simulate nearly identical shapes as SEM images By 3D option, rectangle area between 2 points can be displayed as 3D With capacity option, calculates capacity between wiring and wiring resistance Applies to a broad range of fields, LSI, FPD and magnetic head, etc.
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