Ultra High Performance DFM Browser

Recently,the size of Photo Mask data for Deep-Sub Micron Process is getting bigger and bigger since the data include lots of Dummy Patterns and OPC patterns which did not exist in design phase. As a result, the Photo Mask data become ten times or several hundred times bigger than original layout data, that is Giga or several ten Giga-byte file in disk space. Thus, old types of data viewing tools are unable to handle such huge data anymore, as it is too time-consuming. It is taking longer and longer time to inspect mask data.

HOTSCOPE is an excellent Data Browser for viewing huge size mask data of a Giga-byte or more. HOTSCOPE has the capability to view them quickly and precisely at any viewing magnification and gives efficiency in data inspection for increasing mask data.

Features

Huge Data Handling

HOTSCOPE handles a file which is larger than 2 Giga-byte, a Job file which includes more than thousand files. HOTSCOPE opens and views such huge data in short time.

Multi-Format

HOTSCOPE is able to read various types of format data, GDS2 file, Mask format and Image data. User overlap any combination of opened data with each other on a same window. Not only overlap mask data and GDS2 data, user can overlap GDS2 data and Image data.

Caching

HOTSCOPE opens data directly, means without data conversions.
When opening a file, HOTSCOPE creates a cache file to reduce opening time when the same file is opened repeatedly.

Functions

HOTSCOPE provides lots of functions for data checking. (See details in reverse side.)

Image Processing

HOTSCOPE provide image processing capability, line extraction, area calculation, and so on.

Functions

• Multi file open, Overlapping Display of Data (Any combination of Layout pattern, Job file and Image data) with Rotation and Reflection and Scale Factor.
• Multi Windowing, Coloring and Filling for Layer/Pattern
• Measuring (Corner, Side, Figure, Cell Frame, Critical Dimension, etc)
• Cell/Cell name/Figure search
• Error Trace (Calibre/Hercules Error file)
• MACRO scripting, GDS Cutting out
• Assist Line (X/Y/XY line, Slant line, Circle, and step by step assist lines)
• Bitmap Operation
  (OR,AND,XOR,NOT,OR+,AND+,XOR+,NOT+)
• Area Calculation (Area and Ratio)
• Marking
• Cassette/ Pellicle viewing
• CD measurement script generation
• Image Viewing and Processing
• Customization Lanuage (AXEL), and APIs

Support Format

• MEBES (MODE I/II, EXT, RETICLE, MODE5) Pattern/Job
• HL (700/ 800/ 950 /7000) Pattern/Job
• VSB8 Pattern/ Job, VSB11 Pattern/Job, VSB12 Pattern/Job, Toshiba EB Format(Ver1.0, Ver20.0)
• JEOL (6AIII/ 7000MV/ 9000MV) Pattern/ Job
• OASIS data, MALY & P10 (soon)
• DEF/LEF
• GDS-II, Calibre/Error file, Hercules Error file

Support Platform

• Sun/Solaris-8/-9, HP-UX11
• RedHat/Linux-8/-9, Enterprise3.0
• Windows-2000/-XP

Performance