Supports reticle/mask design for stepper   Possible to examine how to assign reticle/mask cell placement to the panel glass   Develops reticle/mask cell   Enable to divide panel to meet the system specification of each stepper
Reticle Floorplanner  FineRFP
Supports reticle design Automatic cell partitioning and generating blind / auxiliary pattern Easy to examine shot placement Cross probing between glass substrate and reticle/mask Various checking functions Movable area of the stage, checking exposure possibility in consideration of stroke, blind area checking, clearance checking between shots, stroke violation checking Generates recipe information (shot and alignment mark information (CSV, Text))
Glass Floorplanner  FineGFP
Supports multi-panel assignment to the glass substrate Designs glass substrate based on basic shot and reticle parameter information Supports trial of multiple panel assignment to the glass substrate Generates the glass substrate where the panels are assigned and reticle/mask cell Estimates best suited recipe information from glass substrate and shot information Generates recipe information Highlights shot location on the glass substrate corresponding to the recipe information
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